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CD-SEM (Critical Dimension-Scanning Electron Microscope)

Our SEM products use scanning electron microscope technology to measure and review tiny surface structures such as photomask etching and circuitry on wafers with high precision and stability.

Metrology Scanning Electron Microscope

Our CD-SEM tools measure the width, height, sidewall angle, etc. of wiring patterns on semiconductor photomasks and wafers.
Defect Review Scanning Electron Microscope

Our defect review SEM tools perform detailed reviews of minute defects on photomasks.