MASK DR-SEM E5620

MASK-DR SEM E5600 series

The E5620 is a MASK DR-SEM(∗) product for reviewing and classifying ultra-small defects in photomasks and mask blanks. It implements Advantest’s highly stable image capture technology to easily import defect location data from mask inspection systems and automatically image the locations. Compared to the E5610, our predecessor DR-SEM system, the E5620 features a number of improvements designed specifically to target mask requirements for extreme ultraviolet (EUV) lithography.

  • DR-SEM = Defect Review - Scanning Electron Microscope
  • High Spatial Resolution
  • Highly Stable, Fully Automatic Image Capture
  • Compatible with Mask Inspection Systems
  • Elemental Composition Analysis Option
  • Backscattered Electron Analysis Option

For further details, please contact our sales team.
Click here for SEM metrology / review product service and support.

Supported materials 6025 size photomasks
SEM spatial resolution 2nm
EDS energy resolution (Option) 127eV

For further details, please contact our sales team.
Click here for SEM metrology / review product service and support.

ExcelPDF